octafluorocyclobutane

English

Etymology

octa- +‎ fluoro- +‎ cyclobutane

Noun

octafluorocyclobutane (uncountable)

1. The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.

Synonyms

• perfluorocyclobutane