TDMAGe
English edit
Noun edit
TDMAGe
- (organic chemistry) Tetrakis(dimethylamino)germanium, a metalorganic source for germanium nitride (GeN) in MOCVD of semiconductors. It grows GeN instead of Ge, and is used at either high temperatures (600-800 C) or with plasma because of its very low vapor pressure and higher decomposition temperature.